Multi Contact Points Slider for A Surface Acoustic Wave Motor
نویسندگان
چکیده
منابع مشابه
Driving Characteristics of a Surface Acoustic Wave Motor using a Flat-Plane Slider
We discuss the use of a flat-plane slider for a surface acoustic wave (SAW) motor. For stable driving, the SAW motor requires a silicon slider with many microprojections on its surface. Previously, sliders with no projections on the flat-plane surface could not provide stable drive because of contact electrification occurring due to the low electrical conductivity of the lithium niobate stator....
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− Based on first principles a dynamical contact model of a Surface Acoustic Wave motor is built. Besides slider behavior also contact point behavior is obtained, which is hard to acquire experimentally. The contact point behavior is used to explain slider behavior like threshold amplitude and like oscillations that are observed in experimental set-ups.
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Importance of elastic deformation control to obtain large output force with a surface acoustic wave (SAW) motor is discussed in this paper. By adding pre-load to slider, stator and slider surfaces are deformed in a few tens nanometer. Appropriate deformation in normal direction against normal vibration displacement amplitude of SAW existed. By moderate deformation, the output force of the SAW m...
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The design and optimization of nanostructure-based surface acoustic wave (SAW) gas sensor is analyzed based on TiO2 sensing layer and modified electrode dimensions. The sensitivity of the gas sensor depends upon the type of sensing layer used and active surface area obtained by varying the aspect ratio. The performance of the sensor is observed from 0.1ppm to 100ppm concentration of ...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1997
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.117.430